Simulation of Motion Accuracy Considering Loads in Linear Motion Units

다국어 초록 (Multilingual Abstract)

This paper presents the motion accuracy simulation considering loads such as workpiece weight, cutting force, cogging force of a linear motor, and force caused by misalignment and runout error of a ballscrew in linear motion units. The transfer function method is basically utilized to estimate 5-DOF motion errors, together with the equilibrium equations of force and moment on the table. The transfer function method is modified in order to consider clearance changed according to the loads in the double sided hydrostatic/aerostatic bearings. Then, the analytic model for predicting the 5-DOF motion errors is proposed with the modified transfer function method. Motion errors were simulated under different loading conditions in the linear motion units using hydrostatic, aerostatic, and linear motion bearings, respectively. And the proposed analytic model was verified by comparing the estimated and measured motion errors.

참고문헌 (Reference)

1 오정석, "직선운동 시스템의 정밀도 시뮬레이션 기술" 한국정밀공학회 28 (28): 275-284, 2011

2 박천홍, "기계장비 정밀도 시뮬레이션 기술 개발" 한국정밀공학회 28 (28): 259-264, 2011

3 박천홍, "Theoretical Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function" 한국정밀공학회 4 (4): 3-70, 2003

4 Khim, G., "Prediction and Compensation of Motion Accuracy in a Linear Motion Bearing Table" 35 (35): 393-399, 2011

5 오정석, "Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway" 한국정밀공학회 13 (13): 1853-1859, 2012

6 박천홍, "FEM을 이용한 유정압테이블의 운동정밀도 해석 (2. 양면지지형 테이블의 해석 및 실험적 검증)" 한국정밀공학회 19 (19): 65-70, 2002

7 KIMM, "Development of Platform Technology for Machine Accuracy Simulation" 2014

8 김경호, "Analysis of 5-DOF Motion Errors Influenced by the Guide Rails of an Aerostatic Linear Motion Stage" 한국정밀공학회 15 (15): 283-290, 2014