가변 부하를 위한 RF 전원 공급기 설계 = Design of RF Power Supply for Variable Loads

다국어 초록 (Multilingual Abstract)

In the RF gas discharge system the load varies frequently by the operational environment. And it is often necessary to change the matching network to provide the maximum possible power transfer from the oscillator to the RF load.
An Rf oscillator whose variable operating frequency is between 20 and 30 MHz and whose output RF power is about 200 watts was designed to solve this problem.
The conversion efficiency from the DC power was about 80%
It is found that the output oscillating frequency which gives minimum RF reflections from the loads follows automatically to the changes of the load or of the operating conditions. It is also found that the output frequency decreases with the larger load shunt capacitance.

목차 (Table of Contents)

• Ⅰ. 서론
• Ⅱ. 일반적인 임피던스 정합회로의 설계
• Ⅲ. 발진기의 원리와 설계된 회로의 간략한 해석
• Ⅳ. 실험결과 및 고찰
• Ⅴ. 결론