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전병주(Byungjoo Jeon),하종문(Jong Moon Ha),이준민(Junmin Lee),박찬희(Chanhee Park),김수지(Su Jii Kim),윤병동(Byeng Dong Youn) 대한기계학회 2016 대한기계학회 춘추학술대회 Vol.2016 No.12
Chemical-Mechanical planarization (CMP) is a process to flatten a surface of a substrate with combination of chemical and mechanical effect. For a successful CMP process, various operating parameters (e.g. rotating speed and pressure) of CMP should be optimized. However, relationship between the operating parameters and the performance of the CMP process has not been fully identified. To address this challenge, this paper introduces a model that estimates the removal rate of Chemical-Mechanical planarization (CMP) process which is known to represent performance of the CMP machine using various time-series operating parameters. First, 135 features were extracted from the time-series variables for physical representation of the polishing process. Second, Gaussian process (i.e. Kriging) and regression tree were employed to estimate the removal rate of the CMP process. To avoid the overfitting problems, various feature selection schemes were used to define candidates for the best feature subsets. Finally, ensemble regression model was developed to integrate the regression models with the feature subsets.
두 종류의 부하곡선에 관한 공급지장시간기대치(LOLE)의 상호 변환관계성
이연찬(Yeonchan Lee),오웅진(Ungjin Oh),최재석(Jaeseok Choi),차준민(Junmin Cha),최홍석(Hongseok Choi),전동훈(Donghun Jeon) 대한전기학회 2017 전기학회논문지 Vol.66 No.3
This paper develops a conversion function and method transforming from daily peak load curve used LOLED [days/year] to hourly load curve used LOLEH[hours/year]and describes relationship between LOLED [days/year] and LOLEH [hours/year]. The indices can not only be transformed just arithmetically but also have different characteristics physically because of using their different load curves. The conversion function is formulated as variables of capacity and forced outage rate of generator, hourly load daily load factor and daily peak load yearly load factor, etc. Therefore, the conversion function (γ=φ(.)) cannot be simple. In this study, therefore, the function is formulated as linear times of separated two functions. One is an exponential formed conversion function of daily load factor. Another is formulated with an exponential typed conversion function of daily peak load yearly load factor. Futhermore, this paper presents algorithm and flow chart for transforming from LOLED[days/year] to LOLEH[hours/year]. The proposed conversion function is applied to sample system and actual KPS(Korea Power System) in 2015. The exponent coefficients of the conversion functions are assessed using proposed method. Finally, assessment errors using conversion function for case studies of sample system and actual system are evaluated to certify the firstly proposed method.