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A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining
Junmin Park,Haedo Jeong 대한기계학회 2005 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.19 No.11S
Materials are either removed from or added to a device, usually in a selective manner with using thin and/or thick film manufacturing processes that transfer the lithographic patterns into integrated circuits (ICs) or three-dimensional micromachines. This study deals with material removal by chemically assisted mechanical micromachining. Two methods are used chemical mechanical machining method are introduced in this paper. One, mechanically assisted chemical etching, is applied to fabricate a micro beam such as cantilever, and another is chemically assisted mechanical micromachining to fabricate microstructure such as micropattern, microchannel. The results are discussed.
Application to fractional-delayed state approach for sampled-data multi-agent systems
JunMin Park 제어로봇시스템학회 2022 제어로봇시스템학회 국제학술대회 논문집 Vol.2022 No.11
This paper considers the stability analysis problem for sampled-data multi-agent systems by using a fractional-delayed approach. The fractional-delayed approach exploits the fractional-delayed state and its state-space model which is defined between the interval [t<SUB>k</SUB>, t]. And we construct Lyapunov functionals including looped-functional by utilizing this fractional-delayed appraoch. Based on the proposed Lyapunov functional, this paper derives the stability criterion in terms of linear matrix inequalities. Numerical example shows the effectiveness of the proposed criterion.
An improved stability criteria for neutral-type Lur’e systems with time-varying delays
Park, JunMin,Lee, Seok Young,Park, PooGyeon Elsevier 2018 Journal of the Franklin Institute Vol.355 No.12
<P><B>Abstract</B></P> <P>This paper improves stability criteria for neutral-type Lur’e systems with time-varying delays, where the nonlinearity satisfies sector and slope restrictions. A proposed Lyapunov–Krasovskii functional consisting of a quadratic term and integral terms for the time-varying delays and the nonlinearities, has four different characteristics. First, the quadratic term utilizes not only the current and delayed states but also the nonlinear vectors. Second, the integral terms for nonlinearities fully exploit the characteristics of sector and slope restrictions. Third, the integral terms for nonlinearities also exploit the characteristic of incremental restriction induced from the slope restriction. Fourth, this paper utilizes a vector related to the time derivative of the neutral delayed state to handle the neutral delay. Based on the proposed Lyapunov–Krasovskii functional, the improved stability criteria are derived in terms of linear matrix inequalities. Numerical examples show that the proposed criteria present less conservative results than the previous criteria.</P>
Junmin Park,Jinwoo Lee,Sangchul Won 제어로봇시스템학회 2013 제어로봇시스템학회 국제학술대회 논문집 Vol.2013 No.10
This paper proposes an adaptive fuzzy nonsingular terminal sliding mode control (AFNTSMC) scheme for modified function projective synchronization (MFPS) of two different chaotic systems with unknown functions. The proposed scheme combines adaptive fuzzy logic control (AFLC) with fuzzy nonsingular terminal sliding mode control (FNTSMC). The AFLC can estimate the unknown functions. The FNTSMC can reduce chattering phenomenon and convergence time of error states to finite time. The proposed scheme synchronizes these chaotic systems in finite time. The simulation results show the effectiveness of the proposed scheme.
Vibration control of a strip in a Continuous Galvanizing Line using Self-Tuning Neuro-PID controller
JunMin Park,HyungWoong Lee,PooGyeon Park 제어로봇시스템학회 2016 제어로봇시스템학회 국제학술대회 논문집 Vol.2016 No.10
This paper proposes a vibration control scheme of a strip in a continuous galvanizing line using neuro-PID controller which consists of two neural networks and conventional PID controller. One NNs estimates the strip model using input-output data of the strip and other NNs updates the gains of conventional PID controller using the estimated strip model and errors between the desired and actual outputs. The proposed scheme gives the adaptation ability for different strips and operating conditions. To show the effectiveness of the proposed scheme, the FEM model of a strip derived by ANSYS is used for simulation. The simulation result shows that the proposed scheme provides the small estimation error, the reduced strip oscillation and efficient gain tunning.
Junmin Park,Daesung Jung,Wookyong Kwon,Soohee Han,Sangchul Won 제어로봇시스템학회 2015 제어로봇시스템학회 국제학술대회 논문집 Vol.2015 No.10
This paper proposes a periodic adaptive state dependent disturbance observer (PASDDOB) for motor control with the unknown input time delay, known output time delay and unknown phase delay from Q-filter to compensate the state dependent disturbance (SDD) that changes slowly by time. The PASDDOB has a structure that combines the state dependent disturbance observer (SDDOB) with the periodic adaptive learning compensation (PALC). The SDDOB compensates the known output delay and the unknown phase delay from Q-filter. The PALC compensates the unknown input time delay and the time-varying SDD. Therefore, the PASDDOB can compensate the SDD. The effectiveness of the proposed state dependent disturbance compensation method is demonstrated using MATLAB simulation results.