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Heo, Y.W.,Kelly, J.,Norton, D.P.,Hebard, A.F.,Pearton, S.J.,Zavada, J.M.,Park, Y.D. The Institute of Electronics and Information Engin 2004 Journal of semiconductor technology and science Vol.4 No.4
High dose ($3{\times}10^{16}cm^{-2}$) implantation of Fe or Ni ions into bulk, single-crystal ZnO substrates was carried out at substrate temperature of ${\sim}350^{\circ}C$ to avoid amorphization of the implanted region. The samples were subsequently annealed at $700^{\circ}C$ to repair some of the residual implant damage. X-Ray Diffraction did not show any evidence of secondary phase formation in the ZnO. The Ni implanted samples remained paramagnetic but the Fe-implanted ZnO showed evidence of ferromagnetism with an approximate Curie temperature of ${\sim}$240K. Preliminary X-Ray Photoelectron Spectroscopy measurements showed the Fe to be ill the 2+ oxidation state. The earrler density in the implanted region still appears to be too low to support carrier-meditated origin of the ferromagnetism and formation of bound magnetic polarons may be one potential explanation for the observed magnetic properties, No evidence of the Anomalous Hall Effect could be found in the Fe-implanted ZnO, but its transport properties were dominated by the conventional or ordinary Hall effect.
Y.W.Heo,J.Kelly,D.P.Norton,A.F.Hebard,S.J.Pearton,J.M.Zavada,Y.D.Park 대한전자공학회 2004 Journal of semiconductor technology and science Vol.4 No.4
High dose (3×lO^(16)cm^(-2)) implantation of Fe or Ni ions into bulk, single-crystal ZnO substrates was carried out at substrate temperature of ~350℃ to avoid amorphization of the implanted region. The samples were subsequently annealed at 700℃ to repair some of the residual implant damage. X-Ray Diffraction did not show any evidence of secondary phase formation in the ZnO. The Ni implanted samples remained paramagnetic but the Fe-implanted ZnO showed evidence of ferromagnetism with an approximate Curie temperature of ~240K.Preliminary X-Ray Photoelectron Spectroscopy measurements showed the Fe to be in the 2+ oxidation state. The carrier density in the implanted region still appears to be too low to support carrier-meditated origin of the ferromagnetism and formation of bound magnetic polarons may be one potential explanation for the observed magnetic properties. No evidence of the Anomalous Hall Effect could be found in the Fe-implanted ZnO, but its transport properties were dominated by the conventional or ordinary Hall effect.