http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
FeZrBAg 자성막을 이용한 박막 인덕터의 임피던스 특성
송재성(J. S. Song),민복기(B. K. Min),허정섭(J. S. Heo),김현식(H. S. Kim) 한국자기학회 2000 韓國磁氣學會誌 Vol.10 No.5
Double rectangular spiral thin-film inductors were fabricated using Fe_(86.7)Zr_(3.3)B₄Ag_6 thin film with high permeability and resistance, in which easy axis of magnetization of the thin-film was perpendicular or parallel to the current direction. The perpendicular geometry inductor revealed higher inductance than the parallel geometry one, because spin aligns of magnetic film were more easily along the field direction due to higher field intensity in the perpendicular geometry. The increase of the inductance, however, resulted in the decrease of resonance frequency. The permeability was monitored by annealing the thin-films at different temperatures. With increasing the permeability, the inductance increased, but total resistance also increased due to the increase in magnetic core loss. As the resonance frequency was higher in air-core inductor than in magnetic thin-film core inductor, it is suggested to increase the resonance frequency that the characteristic of air-core inductor rather than the magnetic properties of the thin-film should be enhanced.
허정섭,민복기,김현식,송재성,오영우 경남대학교 공업기술연구소 2000 硏究論文集 Vol.18 No.-
본 연구에서는 MHz영역에서 사용가능한 Fe계 연자성 재료를 비정질과 초미세 결정립이 혼재되어 있는 복합상을 가진 합금을 제조하기 위해 Fe-Zr-B계 조성에 Fe와 비고용원소인 Ag를 첨가시킨 Fe□□Zr□B□Ag□ 박막을 DC 마그네트론 스퍼터링법으로 제조하였다. 그리고 다양한 온도에서 1시간동안 열처리한 후 fan을 이용하여 냉각한 후 자기적 특성 및 미세구조의 변화를 열처리 온도에 따라 조사하였다. Fe□□Zr□Ag□박막의 경우 500℃에서 1시간 열처리하였을 때, 보자력은 1.1 Oe, 포화자화는 2.2 T, 투자율은 주파수 50 ㎒대역에서 5400으로 우수한 연자기특성을 나타냈다. Fe□□Zr□B□Ag□ 박막의 손실은 1 ㎒에서 0.7 W/cc로 매우 낮은 값은 가지며, 이는 초미세결정립의 형성으로 인한 투자율의 증가와 Ag 첨가에 의한 자구 미세화로 인해 와전류 손실이 감소하였기 때문이라 생각되며, 고주파 영역에서 우수한 연자기 특성을 나타내었다. The magnetic properties of sputtered Fe□□Zr□B□Ag□ amorphous thin films, which contains an additional insoluble element Ag, have been investigated as a function of non field annealing temperature in order to know its potential application as a core materials of thin film magnetic devices at MHz. The amorphous Fe□□Zr□B□Ag□ thin fims produced by relatively low temperature annealing at 500℃ for 1 hour was found to have high initial permeability of 5400 at 50 MHz, 0.2 mOe, low coercivity of 1.1 Oe and very low core loss of 0.7 W/cc at 1 MHz, 0.1 T, respectively. It is notable that the permeability and core loss values for various kinds of the soft magnetic thin films reported up to now. The reason for the appearance for the good soft magnetic properties is presumably due to the homogeneous formation of very fine bcc α-Fe clusters with the size of 8 nm in the amorphous Fe□□Zr□B□Ag□ thin films matrix, which can be deduced from the XRD results.