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자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-
최기봉,박기환,김수현,곽윤근,Choi, Kee-Bong,Park, Kyi-Hwan,Kim, Soo-Hyun,Kwak, Yoon-Keun 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.4
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니퓰레이션 시스템
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),고국원(Kuk Won Ko) 제어로봇시스템학회 2009 제어·로봇·시스템학회 논문지 Vol.15 No.9
This paper presents a manipulation system consisting of a coarse/tine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The tine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and tine manipulation of micro parts.
접촉식 리소그라피의 정렬공정을 위한 압전구동 초정밀 스테이지
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),임형준(Hyung Jun Lim) 한국생산제조학회 2011 한국생산제조학회지 Vol.20 No.6
This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.
투과형 전자현미경의 고니오미터형 시료 구동 스테이지의 설계
최기봉(Kee-Bong Choi),이상철(Sang-Chul Lee) 한국생산제조학회 2019 한국생산제조학회지 Vol.28 No.5
In this study, a goniometer-type specimen stage for transmission electron microscopy is proposed. The specimen stage is mounted on the side of the vacuum chamber of a transmission electron microscope. A specimen is transported from the environment to the vacuum chamber via a holder, where positioning of the specimen is then conducted. The specimen stage comprises three translations and one rotational motion. As two translations are approximated linear motions, which are a part of the tilt motions, the term ‘goniometer’ is used. The actuation systems have been designed with consideration for the workspace and resolution. An air-locking device was also designed to separate the vacuum chamber from the atmosphere. Finally, the specimen stage was manufactured using aluminum and stainless steel to avoid the effect of a magnetic field. Experiments were then conducted to evaluate the performance of the proposed solution.
2 개의 병진-병진 관절형 병렬 탄성 메커니즘을 갖는 압전구동 소형 XY 스테이지
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),임형준(Hyung Jun Lim) Korean Society for Precision Engineering 2013 한국정밀공학회지 Vol.30 No.12
In this paper, a miniaturized stage with two prismatic-prismatic joints (2-PP) type parallel compliant mechanism driven by piezo actuators is proposed. This stage consists of two layers which are a motion guide layer and an actuation layer. The motion guide layer has 2-PP type parallel compliant mechanism to guide two translational motions, whereas the actuation layer has two leverage type amplification mechanisms and two piezo actuators to generate forces. Since the volume of the stage is too small to mount displacement sensors, the piezo actuators embedding strain gauge sensors are chosen. With the strain gauge-embedded piezo actuators, a semi-control is implemented, which results in hysteresis compensation of the stage. As the results, the operating range of 30 ㎛, the resolution of 20 ㎚, and the bandwidth of 400 ㎐ in each axis were obtained in the experiments.
3차원 미세형상 측정용 탄성힌지 기반 압전구동식 격자 스캐너
최기봉(Kee-Bong Choi),텐 알렉세이 대성(Aleksey-Deson Ten),이재종(Jae Jong Lee),김성현(Sung-Hyun Kim),고국원(Kook Won Ko),권순기(Soon Ki Kwon) 제어로봇시스템학회 2009 제어·로봇·시스템학회 논문지 Vol.15 No.8
This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.
Min-Max 알고리즘을 이용한 피에조 구동형 스테이지의 최적설계 및 성능평가
최기봉(Kee-Bong Choi),한창수(Chang Soo Han) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.9
This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the design variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 ㎐, the operating range of 40 ㎛, and the resolution of 3 ㎚.