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양순철(Sun-Choel Yang),김상혁(Sang-Hyuk Kim),허명상(Myung-Sang Huh),장기수(Ki-Soo Chang),박순섭(Soon-Sub Park),원종호(Jong-Ho Won),김건희(Geon-Hee Kim) 한국기계가공학회 2012 한국기계가공학회지 Vol.11 No.2
Ultra Precision Machining Techniques, such as manufacturing Micro Lens Array(MLA), off-axis mirror, F-θ lens for laser printer, are achieved, based on technologies in consequence of development of modern high-precision machining mechanism. Above all, FTS(Fast Tool Servo) and STS(Slow Tool Servo) are more innovative technologies for reducing time and development costs. In this paper, it is described that MLA machining technique by FTS, off-axis mirror machining technique by STS, optics for observing space, and development of infrared aspheric lens for a thermal imaging microscope.
밀리미터파 간섭계용 타원 반사경의 공구 변화에 따른 고속절삭 특성 연구
이상용(Sang-Yong Lee),김건희(Geon-Hee Kim),김효식(Hyo-Sik Kim),양순철(Soon-Cheol Yang),홍창덕(Chang-Deoc Hong),조병무(Byung-Moo Cho),원종호(Jong-Ho Won) 한국기계가공학회 2007 한국기계가공학회 춘추계학술대회 논문집 Vol.2007 No.-
This study aims to find the optimal cutting conditions, when ellipse mirrors consisted Aluminum alloy were made it the Millimeter-Wave Interferometer System mirror with several tools on the High-Speed Machine. Machining technique for precision machining characteristics of ellipse mirrors consisted Al6061 matter by Ball endmill is reported in this paper. , Results of machining on the High-Speed Machine(using NCD(Natural Crystalline diamond), WC and coated TiAlN ∅6㎜ ball endmill tool) had measurement of surface roughness and form accuracy with cutting conditions(the Feed rate, the Depth of cut and the Cutting speed). the Millimeter-Wave Interferometer System ellipse mirror had been machined foundational precision machining characteristics of aluminum.
밀리미터파 간섭계용 타원 반사경의 공구 변화에 따른 고속절삭 특성 연구
이상용(Sang-Yong Lee),김건희(Geon-Hee Kim),김효식(Hyo-Sik Kim),양순철(Soon-Cheol Yang),홍창덕(Chang-Deoc Hong),조병무(Byung-Moo Cho),원종호(Jong-Ho Won) 한국기계가공학회 2007 한국기계가공학회지 Vol.6 No.4
This study aims to find the optimal cutting conditions, when ellipse mirrors consisted Aluminum alloy were made it the Millimeter-Wave Interferometer System mirror with several tools on the High-Speed Machine. Machining technique for precision machining characteristics of ellipse mirrors consisted Al6061 matter by Ball endmill is reported in this paper., Results of machining on the High-Speed Machine(using NCD(Natural Crystalline diamond), WC and coated TiAlN Ø6㎜ ball endrnill tool) had measurement of surface roughness and form accuracy with cutting conditions(the Feed rate, the Depth of cut and the Cutting speed). the Millimeter-Wave Interferometer System ellipse mirror had been machined foundational precision machining characteristics of aluminum.
LPCVD P₂O5 - SiO₂ 집적광학박막의 제작 및 특성연구(2) : TMPate와 PH₃의 비교
정환재(Hwan Jae Jung),이형종(Hyung Jong Lee),이용태(Yong Tai Lee),전은숙(Eun Suk Jeon),김순창(Soon Chul Yang),양순철(Soon Chang Kim) 한국광학회 1995 한국광학회지 Vol.6 No.3
Low Pressure Chemical Vapor Deposition으로 TEOS, TMPate, PH₃을 이용하여 Si을 기판으로한 집적광학용 P₂O_5-SiO₂(PSG)박막을 만들었으며 P 첨가제인 TMPate와 PH₃의 사용에 따른 증착률, 굴절률, 균일도 등의 특성을 조사 및 비교하였다. TMPate에 의한 PSG 박막은 증착률이 55Å/min으로 PH₃에 의한 PSG 박막의 값인 90Å/min 보다 작았으며, 상대적으로 TMPate-PSG의 두께 균일도는 2%로 PH₃-PSG의 값인 4.5%보다 작아 균일도면에서 훨씬 우수하였다. TMPate-PSG의 굴절률은 파장 633㎚에서 1.445~1.468이였으며, PH₃-PSG는 1.459~1.476으로 TMPate-PSG 보다 높은 굴절률 값을 얻을 수 있었다. We made P₂O5 - SiO₂ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS(tetraethylorthosilicate), TMPite(trimethylphosphite) and phosphine(PH₃). And We studied and compared between TMPite and PH₃ as a dopant of P in PSG films in the aspect of the deposition characteristics. Deposition rate of TMPate-PSG films was 55 Å/min which was smaller than 90 Å/min, that of PH₃-PSG films. Thickness deviation of TMPate-PSG films was 2% and that of PH₃-PSG was 4.5%. So TMPate-PSG films had a good quality in thickness uniformity. The range of refractive index was controlled from 1.445 to 1.468 at 633 ㎚ in TMPate-PSG films and it was controlled from 1.456 to 1.476 in PH₃-PSG films.