광화학증착법에 의한 직접패턴 PZT 박막의 제조 및 특성

박형호,박형호,김태송,Park, Hyeong-Ho,Park, Hyung-Ho,Kim, Tae-Song,Hill, Ross-H. 한국재료학회 2008 한국재료학회지 Vol.18 No.2

The ferroelectric properties of UV irradiated and non-irradiated PZT films prepared via photochemical metal-organic deposition using photosensitive precursors were characterized. Fourier transform infrared spectroscopy showed that complete removal of organic groups was possible through UV exposure of the spin-coated PZT precursor films at room temperature. The measured remnant polarization values of UV-irradiated and non-irradiated PZT films after annealing at $650^{\circ}C$ were 29 and $23\;{\mu}C/cm^2$, respectively. The UV irradiation was found to be effective for the enhancement of the <111> growth orientation and ferroelectric property of PZT film and in the direct patterning in the fabrication of micro-patterned systems without dry etching.

단극하전을 이용한 나노입자 응집성장 제어

박형호,김상수,장혁상,Park, Hyung-Ho,Kim, Sang-Soo,Chang, Hyunk-Sang 대한기계학회 2003 大韓機械學會論文集B Vol.27 No.1

Effects of electric force on the morphology and growth of aggregates were studied experimentally. Nano-sized NaCl particles were supplied to a flame to perform the unipolar charging state. This electric precursor did not modify a temperature profile of the flame. The morphology of aggregates was measured by TEM image processing technique and the light scattering technique. In the unipolar charged state, the fractal dimension of aggregates was smaller than that of' the electrically neutral state. This result was in good agreement with our previous numerical simulations.

철제유물 부식화합물 분석의 표준데이터 확보를 위한 라만 분광법 적용성 연구

박형호,이재성,유재은,Park, Hyung Ho,Lee, Jae Sung,Yu, Jae Eun 국립문화재연구소 2011 保存科學硏究 Vol.32 No.-

It is quite difficult to identify its corrosion compound because they have a wide variety of crystal structures and they are mixed with two component. This study was conducted with the standard iron corrosion compounds through the analysis by Raman Micro-Spectroscopy, which aims to obtain standard Raman Data. To assess the reliability of standard iron corrosion compounds, SEM-EDS analysis and XRD analysis were conducted. Through SEM-EDS analysis, the elements of corrosion compound matched with those of standards iron corrosion compounds except Goethite. XRD analysis showed that the structures of corrosion compounds were identical to those of standard iron corrosion compounds, however, it was identified that Iron sulfate ($FeSO_4{\cdot}6H_2O$) is the Rozenite ($FeSO_4{\cdot}4H_2O$). Through Raman Micro-Spectroscopy analysis, the new peak was detected from the wavenumbers of hydroxide and iron oxide. It is considered that it is due to changes in the wavelength of the laser. As the wavenumbers of iron chloride and iron sulfate have been identified, eight kinds of Raman Data were obtained. It can be considered to contribute to cultral heritage for iron objects that Raman Micro-Spectroscopy analysis which is relatively easy to compare material properties and structures can be highly applicable to the research on cultural heritage with the limited amount of samples.

단극하전 나노입자의 응집성장 과정에서 입자의 전기전도도의 효과에 대한 연구

박형호,김상수,장혁상,Park, Hyung-Ho,Kim, Sang-Soo,Chang, Hyuk-Sang 대한기계학회 2003 大韓機械學會論文集B Vol.27 No.2

Effects of the electric conductivity of particles were studied for the aggregation process of charged particles with a Brownian dynamic simulation in the free molecular regime. A periodic boundary condition was used for the calculation of the aggregation process in each cell with 500 primary particles of 16 nm in diameter. We considered two extreme cases, a perfect conductor and a perfect nonconductor. The electrostatic force on a particle in the simulation cell was considered as a sum of electrostatic forces from other particles in the original cell and its replicate cells. We assumed that aggregates were only charged with pre-charged primary particles. The morphological shape of aggregates was described in terms of the fractal dimension. The fractal dimension for the uncharged aggregate was D$_{f}$= 1.761. However, the fractal dimension decreased from 1.694 to 1.360 for the case of the perfect conductor, and from 1.610 to 1.476 for the case of the perfect nonconductor, with the increase of the average number of charges on the primary particle from 0.2 to 0.3. These values were smaller than that of the centered charge case.e.

C54구조의 $TiSi_2$와 As 이온 주입된 다결정 Si계에서 고온 열처리에 의한 표면상태 거칠어짐과 TiAs 침전물 형성에 관한 연구

박형호,조경익,이희태,성명모,이상환,권오준,남기수,Park, Hyung-Ho,Cho, Kyoung-Ik,Lee, Hee-Tae,Sung, Myung-Mo,Lee, Sang-Hwan,Kwon, Oh-Joon,Nam, Kee-Soo 대한전자공학회 1990 전자공학회논문지 Vol. No.

비로소 높게 이온주입된 다결정 실리콘에 대한 C54 구조를 갖는 $TiSi_{2}$의 열적 안정성과 $TiSi_{2}{\times}As{\longrightarrow}TiAs{\times}2Si$의 TiAs 석출물 형성반응이 다결정 실리콘 박막의 표면 상태 거칠어짐에 미치는 영향을 살펴보았다. Thermal stability of $TiSi_{2}$ with C54 structure and morphology degradation of poly silicon layer resulted from the formation of TiAs precipitate through the reaction between T>$TiSi_{2}$</TEXT> and arsenic ion implanted in poly silicon have been studied.

전기장이 형성된 관성 충돌기에서 대전 입자의 거동과 부착 특성에 대한 연구

박형호,김상수,Park, Hyung-Ho,Kim, Sang-Soo 대한기계학회 1999 大韓機械學會論文集B Vol.23 No.3

Effect of electrostatic and inertial forces on the pre-charged particle deposition was theoretically and experimentally studied by introducing the inertia impactor subjected to an electric field. To derive the analytic solution, we assumed that a flow was an ideal stagnation flow, a particle had saturation charges, and the electric field within the test section was uniform. On the other hand, $Al_2O_3$ particle groups were used as the test particles, which mean sizes were $1{\mu}m$, $3{\mu}m$, and $5{\mu}m$. To measure the deposition efficiency, the light scattering method was used. The results showed that the deposition efficiency was minimized at a certain nozzle velocity as increasing the nozzle velocity, only if the electric force was applied. As the electric field strength increased, $Stk_{50}{^{1/2}}$ was decreased, and its decreasing rate was reduced with increasing the flow velocity. Moreover the existence of electric field was against the cut-off performance of the inertia impactor.

철제유물 부식인자에 대한 부식양상 및 부식화합물 실험 연구

박형호,이재성,유재은,Park, Hyung Ho,Lee, Jae Sung,Yu, Jae Eun 국립문화재연구소 2012 保存科學硏究 Vol.33 No.-

The corrosion phenomena of the iron artifacts was studied by morphology observation and instrumental analysis(EDS, XRD, Raman) with various corrosion factors in oder to verify to confirm the danger of corrosion factors. Corrosion compounds were collected by depositing pure Fe powder(99%) into a HCl, $HNO_3$, $H_2SO_4$, and $H_2O$ solution which contained the corrosion factors. Stereoscopic-microscope observations were then conducted determine the colors and shapes of the collected corrosion compounds, and SEM-EDS analysis was conducted to confirm the corrosion factors and the growth of these compounds. X-ray diffraction (XRD), Raman analyses were conducted to examine the crystal structure and compositions of the created corrosion compounds. The results of the experiment revealed that corrosion speed was faster in an acidic environment and corrosion of HCl and $H_2SO_4$ was greater than that of $HNO_3$. The corrosion compounds of HCl grew into a needle or chestnut-like shape after being affected by Cl- ion, and XRD and Raman analyses detected goethite and lepidocrocite. The corrosion compounds of $H_2SO_4$ was affected by S ion and grew into a slender-needle-like or cylindrical shape, and the XRD and Raman analyses detected goethite and lepidocrocite. The corrosion compounds of $HNO_3$ grew into a spherical or plate-like shape after being affected by O ion and the XRD and Raman analyses detected magnetite and lepidocrocite. Although the corrosion compounds of $H_2O$ grew into a spherical or plate-like shape after being affected by O ion, most of them were observed to have had spherical shapes, and the XRD and Raman analyses failed to detect corrosion compounds in them. It was found in the study that corrosion characteristics and compounds are diversely displayed according to the corrosion factor.

$CHF_3/C_2F_6$ 반응성이온 건식식각에 의해 변형된 실리콘 표면의 열적 거동에 관한 연구

박형호,권광호,곽병화,이중환,이수민,권오준,김보우,성영권,Park, Hyung-Ho,Kwon, Kwang-Ho,Koak, Byong-Hwa,Lee, Joong-Whan,Lee, Soo-Min,Kwon, Oh-Joon,Kim, Bo-Woo,Seong, Yeong-Gwon 한국재료학회 1992 한국재료학회지 Vol.2 No.1

Thermal behavior of residue and damaged layer formed by reactive ion etching (RIE) in $CHF_3/C_2F_6$ were investigated using X-ray photoelectron spectroscopy(XPS) and secondary ion mass spec-trometry(SIMS) techniques. Decomposition of polymer residue film begins at $200^{\circ}C$ and above $400^{\circ}C$ carbon compound as graphite mainly forms by in-situ resistive heating. It reveals that thermal decomposition of residue can be completed by rapid thermal anneal treatment above $800^{\circ}C$ under nitrogen atmosphere and out-diffusion of carbon and fluorine of damaged layer is observed.

백내장 진료비 부당·과잉청구에 대한 민사적 쟁점 검토 : 서울중앙지방법원 2021. 1. 26. 선고 2018가합531217 판결을 중심으로

박형호(Park, Hyung Ho),임웅찬(Lim, Ung Chan),김형진(Kim, Hyung Jin) 한국보험법학회 2021 보험법연구 Vol.15 No.2

백내장은 눈 속 수정체가 혼탁해져 시력장애가 발생하는 질환이고, 백내장 수술은 인공수정체를 삽입하는 방법으로 이루어진다. 백내장 수술 비용은 백내장 수술 전 시행하는 검사비가 얼마인지와 인공수정체를 삽입할 때 단초점렌즈와 다초점렌즈 중에서 어떤 것을 사용할지에 따라 대단히 크게 차이 날 수 있다. 2016년 1월 이전 실손의료보험 약관은 “안경, 콘택트렌즈 등을 대체하기 위한 시력교정술”을 면책사유로 규정하였는데, 금융분쟁조정위원회의 2016년 3월 29일자 조정결정(제2016-3호)은 약관해석상 다초점렌즈 비용에는 위 면책사유가 적용되지 않아 다초점렌즈가 실손의료보험의 보장대상에 포함된다고 판단하였다. 이후 2016년 1월 개정 보험약관에서는 “국민건강보험법 요양급여 대상 수술방법 또는 치료재료대가 사용되지 않은 부분은 시력교정술로 본다”는 문언을 추가하면서 다초점렌즈 비용이 면책사유에 해당하게 되었다. 그러자 일부 안과의원은 여기에 대응하여 실손의료보험의 보장을 받을 수 없는 다초점렌즈 비용을 낮추는 대신, 계측검사와 안구초음파 비용을 높이는 방식으로 진료비를 청구하였다. 그러다가 2020년 9월부터는 초음파 등 검사비용이 요양급여 대상이 되면서 계측검사와 안구초음파 비용을 환자들에게 청구할 수 없게 되었고, 이제 안과의원은 다초점 렌즈비를 다시 대폭 상향하여 청구하고 있다. 이처럼 일부 안과의원은 실손의료보험 약관이 개정되거나 보건당국의 정책이 바뀔 때마다 비급여 렌즈비용과 검사비용을 선택적으로 과도하게 청구함으로써 수익 창출의 수단으로 삼고 있는 것이다. 그런데 최근 서울중앙지방법원 2021. 1. 26. 선고 2018가합531217 판결은 의료기관이 환자와 합의하여 백내장 검사비와 같은 법정 비급여 비용을 자율적으로 정할 수 있기는 하지만, 치료의 경과, 난이도, 비용 책정 경위 등에 비추어 신의성실과 형평의 원칙에 반하여 과도하게 그 비용을 산정한다면 그 중 상당하다고 인정되는 범위를 초과하는 비용은 법률상 원인이 없어 부당이득이 된다고 보았다. 대상판결 사안에서 피고 병원이 다른 병원에 비하여 특별히 고가의 장비를 사용하지도 않았는데 서울지역 평균금액의 20배 가까운 금액을 지급받았다는 점은 선뜻 납득하기 어렵다. 의료분야는 다른 분야에 비해 공익적 개입의 필요성이 특히 더욱 강하게 요구된다는 점을 감안할 때, 대상판결은 신의칙의 계약수정 기능을 적절히 활용하여 사회적으로 타당한 결론을 도출하였다고 평가할 수 있다. 한편, 대상판결은 피보험자가 무자력이 아니어도 보험자가 피보험자의 부당이득반환청구권을 행사하기 위하여 채권자대위권을 행사할 수 있다고 판단하였다. 이는 채권자대위권이 그저 책임재산 보전의 수단에 머물러 있는 것이 아니라, 채권자의 권리실현을 돕는 수단임을 분명히 한 것이다. 채권자대위권을 이렇게 활용할 경우 보험자와 안과 의원 사이에서 실질적인 분쟁 구조에 부합하는 소송이 이루어질 수 있고, 채권자대위권이 안과 의원의 일탈을 효과적으로 견제할 수 있는 수단도 될 것이다. 위와 같은 대상판결의 내용은 백내장 수술시 발생하는 비급여 검사비에만 적용되는 것이 아니라, 의료기관이 임의로 산정하여 청구하는 모든 비급여 비용에 똑같이 적용 가능할 것이다. 끝으로 본고에서는 백내장 진료비를 청구한 안과 의원에게 불법행위책임을 인정할 수 있는지를 검토하였다. 법정 비급여 진료비용을 확정하는 문제가 사적 자치 영역에 해당하더라도 이를 무한히 허용할 수는 없는 점, 안과 의원이 약관과 정책이 변화할 때마다 상당한 이유 없이 안과의 수익을 극대화하는 방향으로 검사비와 렌즈비를 급격히 높이고 있는 점, 실제와 다르게 입원시간을 허위로 기재하여 입원확인서를 발급하고 있는 점, 안과 의원이 발급한 진단서를 매개로 보험자가 보험금을 지급하게 되므로 보험자의 손해와 안과 의원의 행위 사이에 상당인과관계도 인정할 수 있는 점 등을 고려할 때 안과 의원의 보험자에 대한 불법행위책임을 인정할 여지가 충분하다고 판단한다. 하급심 법원은 안과 의원의 불법행위책임에 대해 현재 소극적인 태도를 보이고 있으나, 앞으로 전향적인 입장 변화가 필요하다. Cataract surgery to improve a disease in which the lens in the eye becomes cloudy is performed by inserting an artificial lens. There is a big difference in costs depending on the examination costs and whether a monofocal lens or a multifocal lens is inserted. The insurance company had excluded multifocal lenses from compensation on the basis that the medical insurance policy for loss of life prior to January 2016 stipulated that vision correction surgery to replace eyeglasses and contact lenses was exempted from compensation. The Financial Dispute Mediation Committee decided that the insurance company should compensate the cost of the multifocal intraocular lens as well as examination costs in its mediation decision on March 29, 2016 (No. 2016-3). Thereafter, the standard insurance terms and conditions were revised in January 2016, and added the phrase, The part other than surgical methods or treatment materials subject to medical care benefits under the National Health Insurance Act is considered vision correction surgery and the insurance company decided not to compensate for the cost of multifocal lenses. Then, some cataract surgery clinics have claimed medical expenses in which costs of multifocal lenses were reduced and the costs of ultrasonic and measurement examinations were increased. Since the clinics becomes unable to charge the patients with non-medical care benefit costs for examinations after September 2020 when the Ministry changes its policy of examination costs including ultrasonics to be subject to medical care benefits, the clinics tend to increase costs of multifocal lenses. As such, some ophthalmic clinics arbitrarily change and claim the lens cost and examination cost according to the insurance company s policy revision or policy change, thereby generating profits. Seoul Central District Court’s decision on January 26, 2021 ruled that considering the course of treatment, difficulty, cost setting, if the cost is excessively determined against the law of good faith, the cost exceeding the range recognized as significant is considered to be unfair because there is no legal cause. In this case, it is difficult to readily understand that the defendant hospital was paid close to 20 times the average amount in Seoul even though it did not use particularly expensive equipment compared to other hospitals. Considering the fact that compared to other fields, the medical field requires a particularly strong need for intervention in the public interest, it can be evaluated that the court drew a socially reasonable conclusion by appropriately utilizing the contract modification function of the principle of good faith. On the other hand, the court ruled that even if the insured was not helplses the insurer could exercise the subrogation right of the creditor in order to exercise the insured s right to claim the return of unreasonable profits. This makes it clear that the subrogation right of creditors is not just a means of preserving liability, but a means of helping creditors to realize their rights. If the subrogation right of creditors is used in this way, a lawsuit that conforms to the actual dispute structure between the insurer and the ophthalmologist can be made, and the subrogation right of the creditor will be an effective means to check the deviation of the ophthalmologist. The contents of the judgment will not be applied only to the uninsured examination costs incurred for cataract surgery, but also will be applicable to all uninsured costs that medical institutions arbitrarily calculate and claim. In addition, this study seeks to whether the ophthalmologist who has claimed the cost of cataract treatment is liable for tortious acts. Even if the issue of determining non-covered medical expenses is within the field of private autonomy, it cannot be allowed indefinitely.

Photo-induced hybrid nanopatterning of metal oxide via direct imprint lithography

박형호(Hyeong-Ho Park),최대근(Dae-Geun Choi),Xin Zhang,김기돈(Ki-don Kim),최준혁(Jun-Hyuk Choi),이지혜(Jihye Lee),박형호(Hyung-Ho Park),Ross Henry Hill,이응숙(Eung-Sug Lee),정준호(Jun-Ho Jeong) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4

A novel ultraviolet (UV)-assisted imprinting procedure that employs photosensitive zirconyl 2-ethylhexanoate is presented for the fabrication of both amorphous and crystalline zirconium dioxide (ZrO₂) nanostructures. Upon annealing at 400 C for 1 h, the lateral shrinkage and thickness shrinkage of ZrO₂ nanostructures were 69.8 and 66.7%, respectively, indicating an isotropic volume loss. During UV irradiation and annealing treatment, the refractive index of UV-irradiated ZrO₂ film is gradually increased by improvement in the packing density and crystallinity of the film. With increasing UV exposure time and annealing temperature, the optical band gap (Eg) of the UV-irradiated ZrO₂ film is red-shifted from 5.745 to 5.265 eV, due to the removal of organic groups and the resultant densification of the film during the photochemical reaction and the heat-induced increase in the crystallinity of the film. These results suggest that the refractive index and optical Eg of ZrO₂ nanostructures could be controlled by tuning the conditions of UV exposure time and annealing treatment. Nanopatterns of ZrO₂, fabricated by direct UV-assisted nanoimprint lithography, are potential candidates for protective coatings for optical mirrors and filters, e.g. high-reflectivity mirrors and broadband interference filters, as well as active electro-optical devices where ordered surface nanostructures are necessary.