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재생타겟으로 제조된 ITO 박막의 표면 및 기계적 특성 연구
모영준(Yeong-Jun Mo),이기성(Ki-Seong Lee),박태성(Tae-Sung Park),박익근(Ik-Keun Park),김용성(Young Sung Kim) 한국생산제조학회 2020 한국생산제조학회지 Vol.29 No.2
We prepared ITO thin films using a recycled target with composition ratio of In₂O₃ : SnO₃ (90 : 10 wt%). ITO thin films deposited on a glass plate at room temperature were examined for surfaces and micro structures at different heat-treatment temperatures. The mechanical properties of the transparent electrodes were also evaluated using an ultrasonic microscope and nanoindenter. When the annealing temperature was above 200℃, the ITO thin films showed stable transparent-electrode characteristics with resistivity of 1.55 × 10<SUP>-4</SUP> Ωcm and high transmittance of > 85% at 550 nm through the processes of recovery and recrystallization. Results of nondestructive characterization using the ultrasonic microscope for the ITO thin-film surfaces and internal defects showed that the effects of changes to the internal defect density in the films were more dominant than those to the film surfaces. In addition, the film durability was evaluated by measuring the plasticity index using a nanoindenter.