The TDDB Characteristics of Thin $SiO_2$ with Stress Voltage Polarity

김천수,이경수,남기수,이진효,Kim, Cheon-Soo,Yi, Kyoung-Soo,Nam, Kee-Soo,Lee, Jin-Hyo 대한전자공학회 1989 전자공학회논문지 Vol. No.

얇은 산화막의 신뢰성을 정전류 스트레스 방법으로 조사하였다. 실험에 사용된 소자는 산화막 두께가 20~25nm인 다결정실리콘 MOS 커패시터 이었다. VLSI 신뢰성 평가에 필수적인 자동측정 및 통계적 데이타분석을 HP9000 컴퓨터를 이용하여 수행하였다.측정한 TDDB 결과로부터 산화막의 결합밀도, 절연파괴 전하량(Qbd), 수명등을 측정한 결과 스트레스를 가하는 극성에 따라서 다른 특성이 나타났다. 결함밀도는 (-) 게이트 주입의 경우에 62개$cm^2$ 이었다. 절연파괴 전하량은 (+) 게이트 주입의 경우 30C/$cm^2$이었고, (-)게이트 주입의 경우가 1.43$cm^2$/A 이었고, (+)게이트 주입의 경우가 1.25$cm^2$/A이었다. The reliability of the thin thermal oxide was investigated by using constant current stress method. Polysilicon gate MOS capacitors with oxide thickness range of 20-25nm were used in this experiment. Automatic measurement and statistical data analysis which were essential in reliability evaluation of VLSI process preformed by HP 9000 computer. Based on TDDB results, defect density, breakdown charge (Qbd) and lifetime of oxide film were evaluated. According to the polarity of the stress, some different characteristics were shown. Defect density was 62/$cm^2$ at negative gate injection. The value of Qbd was about 30C/$cm^2$ at positive gate injection, and about 21C/$cm^2$ at negative. The current density acceleration factor was 1.43$cm^2$/A for negative gate injection, and 1.25$cm^2$/A for positive gate injection.

전자선 직접묘사에 의한 Deep Submicron $p^+$Poly pMOSFET 제작 및 특성

김천수,이진호,윤창주,최상수,김대용,Kim, Cheon-Su,Lee, Jin-Ho,Yun, Chang-Ju,Choi, Sang-Soo,Kim, Dae-Yong 한국전자통신연구원 1992 전자통신 Vol.14 No.1

$0.25{\mu} m$ 급 pMOSFET소자를 구현하기 위해, $P^+$ 폴리실리콘을 적용한 pMOS를 제작하였으며, $p^+$ 폴리실리콘 게이트 소자에서 심각하게 문제가 되고 있는 붕소이온 침투현상을 조사하고 붕소이온 침투가 일어나지 않는 최적열처리온도를 조사하였다. 소자제조 공정중 게이트 공정만 전자선 (EBML300)을 이용하여 직접묘사하고 그 이외의 공정은 stepper(gline) 을 사용하는 Mix & Match 방법을 사용하였다. 또한 붕소이온 침투현상을 억제하기 위한 한가지 예로서, 실리콘산화막과 실리콘질화막을 적층한 ONO(Oxide/Nitride/Oxide) 구조를 게이트 유전체로 적용한 소자를 제작하여 그 가능성을 조사하였다. 그 결과 $850^{\circ}C$의 온도와 $N_2$ 분위기에서 30분동안 열처리 하였을 경우, 붕소이온의 침투현상이 일어나지 않음을 SIMS(Secondary Ion Mass Spectrometer) 분석 및 C-V(Capacitance-Voltage) 측정으로 확인할 수 있었으며 그 이상의 온도에서는 붕소이온이 침투되어 flat band전압(Vfb)을 변화시킴을 알았다. 6nm의 얇은 게이트 산화막 및 $0.1{\mu} m$ 이하의 LDD(Lightly Doped Drain) $p^-$의 얇은 접합을 형성함으로써 소자의 채널길이가 $0.2 {\mu} m$까지 짧은 채널효과가 거의 없는 소자제작이 가능하였으며, 전류구동능력은 $0.26\muA$/$\mu$m(L=0.2$\mu$m, V$_DS$=2.5V)이었고, subthreshold 기울기는 89-85mV/dec.를 얻었다. 붕소이온의 침투현상을 억제하기 위한 한가지 방법으로 ONO 유전체를 소자에 적용한 결과, $900^{\circ}C$에서 30분의 열처리조건에서도 붕소이온 침투현상이 일어나지 않음으로 미루어 , $SiO_2$ 게이트 유전체보다 ONO 게이트 유전체가 boron 침투에 대해서 좋은 장벽 역활을 함을 알았다. ONO 게이트 유전체를 적용한 소자의 경우, subthreshold특성은 84mV/dec로서 좋은 turn on,off 특성을 얻었으나, ONO 게이트 유전체는 막자체의 누설전류와 실리콘과 유전체 계면의 고정전하량인 Qss의 양이 공정조건에 따라 변화가 심해서 문턱전압 조절이 어려워 소자적용시 문제가 된다. 최근 바닥 산화막(bottom oxide) 두께가 최적화된 ONO 게이트 유전체에 대하 연구가 활발히 진행됨을 미루어, 바닥 산화막 최적화가 된다면 더 좋은 결과가 예상된다.

약혼해제에 관한 해석론과 입법론

김천수(Kim, Cheon-Soo) 한국가족법학회 2018 가족법연구 Vol.32 No.2

Korean Civil Code (hereafter ‘KCC’) rules the engagement relationship in a legal system. The legitimate causes for the termination of the engagement are prescribed in the Code. The Code imposes the liability for damages on the negligent fiance in the case of the termination of engagement. In the case of disengagement, the academic theory and the courts affirm the restitution of the engagement mementos without the specifically related clause in the Code. It is a big issue whether it would be proper to rule an engagement relationship in a legal system or moral dimension. However, it is not desirable to change a legal system lasting for the 60 years radically to rule the engagement relationship in the moral dimension. The issues discussed in this paper are as follows. According to the dominant view, the duty of sexual fidelity is not imposed and the freedom to terminate engagement could be enjoyed on and by any fiance, which must coincide with the common sense. However, one of the legitimate causes for disengagement is “the adultery with another person after an engagement”, which is the Article 804 (ⅴ) KCC. The interpretation that the fiance s duty of sexual fidelity should be denied in spite of such a clause contradicts the interpretation that the duty of sexual fidelity is imposed on the spouse on the base of Article 840 (ⅰ) KCC which stipulates that the misconduct of the spouse should be a legitimate cause of divorce. Furthermore, since the legitimate causes of disengagement are prescribed in Article 804 KCC, it is questionable whether the fiance has the freedom to terminate the engagement without any legitimate cause. Therefore, it is reasonable to delete Article 804 KCC, which prescribes the legitimate causes of disengagement. There is also another question of whether disengagement is the “rescission” of Article 543 KCC which means the retrospective and prospective nullification of contract, or “termination” of Article 550 KCC which means only the prospective nullification of contract. It is not desirable to retroactively terminate an engagement that has the nature of a continuing contract, as long as there are no grounds for invalidation. It is reasonable to discipline the resolution of a committed relationship only in the future, as in the case of marriage, in the law of which Article 824 KCC regulates the effect of marriage cancellation only perspectively and the effect of divorce is naturally recognised only in the future. Another issue is the discussion of damages prescribed by Article 806 KCC. It is doubtful whether the damages would be for loss of profit expected by the performance of the engagement contract. Even if so, it is unclear what the contents of the profit would be. Another question is whether it would be possible to replace the compensation for the profit with the compensation for the cost or status expended in reasonable reliance on the performance of contract. Even on the base of affirmation of the replacement, it is a problem how much the ultimate compensation would be paid if the compensation of the reliance profit should be limited within the scope of the performance profit. It is desirable to enumerate the list of the specific items in the scope of damages, in order to resolve the questions referred to above from the point of view of the general rule of compensation law. In the case of a disengagement, there is no provision and no opposition concerning and against the restitution of engagement mementos, but there is only controversy about the legal theory for the affirmation of the restitution. It is doubtful whether the theory of gift under condition subsequent (the dominant view) would coincide with the actual intent of the fiances or not. The other theories also have problems pointed out by the dominant view. There is no argument against the restitution of the mementos but a controversy only about the theory for the restitution.

결정질암반에서의 지하수유동 연구경향

김천수 ( Cheon Soo Kim ) 대한지질공학회 1991 지질공학 Vol.1 No.1

쌍무계약상 채권자의 위험부담과 채무자의 이익상환

김천수(Kim Cheon-Soo),이우진(Lee Woo-Jin) 성균관대학교 법학연구소 2006 성균관법학 Vol.18 No.1

  This paper aims at analyze the debtor"s duty to reimburse the profit under the creditor"s risk of loss in the bilateral contract. The relating arguments in several foreign countries including Germany, America and Japan is introduced and studied for the comparison with Korean argument.<BR>  The four countries have the same principle that the debtor should risk the loss or destruction of the subject matter of the contract without any fault of the parties of the bilateral contract. They have the similar exceptions that the risk is shifted from the debtor to the creditor. The exception cases are where the creditor is negligent in the loss or destruction, where the loss or destruction occurs without any fault of the parties while the creditor delays reception of the subject matter, and where the subject matter is delivered to the creditor before its title is transferred to him.<BR>  The creditor should perform his duty in the contract without receiving the equivalent from the debtor according the exception rule because the creditor is culpable about the impracticability of performance of the equivalent. The creditor"s unilateral performance means that he compensates for the loss which he inflicted on the debtor. So he should perform his duty just within the actual loss. Therefor when the debtors takes some profit owing to exemption from his duty, the profit should be deducted from the loss.<BR>  The employee can claims back-pay to the employer who fired the employee unduly and illegally. When the employee get the income from another job during the discharge period, the employer does not have to pay the amount corresponding to the income. But the Korean Supreme Court rules that the employer should give the more back-pay to the employee than the amount of compensation for business suspension by the labour law. Its justifications are poor, but the conclusion is correct.

한국 PR산업 특성에 대한 탐색적 연구: 적소이론을 적용하여

김천수 ( Cheon Soo Kim ),박현순 ( Hyun Soon Park ) 한국PR학회 2007 PR연구 Vol.11 No.3

The theory of the niche was applied to explore the competitive environment of public relations industry in Korea. Public relations agency`s client business type was taken as a niche dimension. Niche breadth and niche overlap of the client business type in terms of retainer based service and consulting project based service were examined. Results showed that niche breadth mean was 3.609 and 2.991 in the retainer based service and the consulting project based service respectively. The result suggests that public relations agencies in Korea are competing for each other with clients in little variety of business type. Niche overlap mean was 0.381 and 0.589 in the retainer based service and the consulting project based service respectively, which means that competition among public relations agencies was more severe in the area of the retainer based service rather than in the area of the consulting project based service.

제조물책임법상 제조물의 개념-미국 제조물책임 리스테이트먼트와 비교하여-

김천수(Kim. Cheon-soo) 성균관대학교 법학연구소 2004 성균관법학 Vol.16 No.1

This paper includes the comparison of the concept of the word "products" m the Korean Products Liability with that of Products Liability Restatement published by American Law Institute 1998, The establishment of the concept is the prerequisite for application of the Act. As far as the concept is concerned, the Act should be reformed, Especially the requirement that the products should be one manufactured or processed should be left out. The requirement does not suit the legislative intent of the Act, that is to make the damages dispersed socially, The intent could be kept when we require the feasibility of the producer of the products to apply the Act to the defect in his products, Many kinds of objects is analysed under the intent in this paper, The result IS to broaden the scope of the concept.

債權者取消權의 法的 性質

김천수(Kim Cheon-Soo),이상진(Lee Sang-Jin) 성균관대학교 비교법연구소 2005 성균관법학 Vol.17 No.3

Creditors can contest dispositions including transfers by the debtors under certain circumstances. This paper refers to the arguments in Korea, Germany, France and Japan about the nature of the creditors' right to contest and the effect of the contestation. It is the very substantial point that the protection of the creditors should be balanced with the protection of the safe transaction and the third parties' interests. The first author has the different opinion from the second author's position that the opinion of majority and precedent in Korea should be followed. It is the first author' argument that the opinion of majority and precedent has many logical defects. His point is that the opinion of majority and precedent should be abandoned and the new way to balancing the protection of the creditors and of the safe transaction and the third parties' interests under the present enforcement law system of Korea.

醫療訴訟에서 證明에 관한 論議 - 診療過誤의 證明責任에 관한 韓國과 中國의 論議를 比較하면서

김천수(Kim Cheon-Soo),박동매(Piao Dong-Mei) 성균관대학교 법학연구소 2006 성균관법학 Vol.18 No.1

  The social cost caused by the medical disputes has been increasing to be sufficiently high to danger the reasonable operation of the Korean medical system. The defensive medicine is one of the principal factors increasing the medical cost in Korea. It resulted in the defensive medicine that many patients or their families averted their eyes from the court in case of the medical accidents. They incline to believe that the medical litigation system is so much in favor of the medical doctors or hospitals, that the system is meaningless to their damage.<BR>  Therefore the fair system of the medical litigation is necessary for the control of the social cost referred to above. The core problem is the distribution of burden of proof of the medical fault and cause in fact. Many countries" courts including Korean Supreme Court tend to alleviate the patients" burden of proof. The Chinese Supreme Court, however, regulated the shift of the burden of proof from the plaintiffs to the defendants.<BR>  This paper aims at the analysis of the Korean medical litigation system, especially of the distribution of the burden of proof of the medical fault and cause in fact. It is the comparison of the distribution of the burden of the proof between in Korea and in China that this paper chose as a approach for carrying out the analysis.<BR>  The determination to introduce the medical litigation system shifting the burden of proof of medical fault and cause in fact in the medical accidents needs another arguments many issues including the medical liability insurance, compensation of the damage caused by the medical accidents without fault, and the criminal privilege of the medical doctors. It should be noted that the reasonable solution system of medical dispute does not save only the social cost but also the individual cost of the parties involved in or related with the medical accidents.

民法 제536조 同時履行抗辯權 規定 適用의 範圍와 效果

김천수(金天秀, Kim, Cheon Soo) 성균관대학교 비교법연구소 2008 성균관법학 Vol.20 No.3S

In this paper, it is suggested that the debtor, that is, the defendant, should have the right to refuse to accept a claim by the creditor, being the basic element of a defense of simultaneous performance, if Section 536 of the Korean Civil Code applies to him or her. The court should take into account in judgment the defendant’s such refusal right and its derivative effects, as long as the refusal right comes to the attention of the court during the proceedings between the defendant and the creditor, even if the defendant has not expressly exercised the refusal right. Consequently, the defendant shall be exempt from the liability for delay in performance of his or her obligation to the extent of the same amount; the plaintiff shall not setoff any account receivable by the defendant against the plaintiff’s claim not so accepted by the defendant. The court should entertain the plaintiff’s claim on the condition that the plaintiff is only entitled to enforce the claim in exchange for the performance of his or her obligation as a quid pro quo. One idea behind the above mentioned suggestion is that it is unjust if one party should conduct his or her obligation without the other party’s performance of the obligation under the concurrent performance condition so that the latter could enjoy a windfall. The other idea is that the suggestion is helpful for the effective dispute resolution. According to the legal theory of civil procedure law, the court could take into account in judgment the defense of fact in substantive law, as long as it comes to the attention of the court without the defendant’s express pleading of the defense, but the court could do so in the case of the defense of right in substantive law only with such express pleading of defense. However the theory would not be proper at least in the case of performance of obligation under the concurrent performance condition.