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Development of Aspheric Surface Profilometry using Curvature Method
김병창 한국정밀공학회 2015 International Journal of Precision Engineering and Vol. No.
A curvature method is one promising possibility for the measurement of optical aspheric or freeform surface, which is the major part of an optical system, such as google glasses, and wearable devices. Increasing demand for highly accurate optical components requires accurate and efficient measurement techniques. In this paper, we have presented a method of aspheric surface reconstruction from curvature data by using white-light-interferometer as a curvature sensor. This sensor was found to be robust to mechanical position error and environmental noise via error diagnosis. The primary mirror of cassegrain type astronomical telescope was tested. The measurement results showed that white-light scanning interferomete was found to be suitable for measuring the aspheric surface profile as a curvature sensor.