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레이저 국소증착을 이용한 TFT-LCD 회로 수정용 미세 텅스텐 패턴 제조
박종복(Jong-Bok Park),김창재(Chang-Jae Kim),박상혁(Sang-Hyuck Park),신평은(Pyung-Eun Shin),강형식(Hyoung-Shik Kang),정성호(Sung-Ho Jeong) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.8
This paper presents the results for deposition of micrometer-scale metal lines on glass for the development of TFT-LCD circuit repair-system. Although there had been a few studies in the late 1980’s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351㎚) of high repetition rates, up to 10 KHz, was used as the illumination source and W(CO)? was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 ㎚ depending on laser power and scan speed while the width was controlled between 3∼50 ㎛ using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below 1 Ωㆍ㎛, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.
制州火山灰土에서 燐酸施肥量 差異가 制州 在來 大豆의 生育과 收量形疾에 미치는 影響
宋昌吉,趙南棋,姜炯式 濟州大學校 亞熱帶農業硏究所 1994 亞熱帶農業硏究 Vol.11 No.-
本 試驗은 濟州火山灰土에서 大豆 (濟州在卒 검정콩)를 栽培하는 경우 適正 燐酸 施肥量을 究明하기 위하여 遂行되었으며 그 結果를 要約하면 다음과 같다. 1. 燐酸 施用量이 增加함에 따라 莖長, 莖直徑은 점차 增加하는 傾向을 나타내고 있으나 그 增加幅은 점차 줄어들고 있다. 2. 分枝數, 株當莢數와 乾物量은 施用量이 12㎏/10a에서 가장 높게 나타나고 있으나 未莢數에서는 處理間에 有意性이 나타나지 않았다. 3. 主莖節數와 百粒重은 9㎏/10a 施用區에서 다소 높은 數値를 보이고 있으나 12㎏/10a施用區와는 별로 差異가 認定되지 않았으며 5%에서 有意하였다. 4. 種實收量은 燐酸 施肥量이 12㎏/10a까지는 增加하는 傾向을 보였으나 그 이상 施用에서는 오히려 줄어드는 趨勢를 보여주었다. 5. 種實收量은 草長, 莖直徑, 分枝數, 株當莢數, 乾物量, 百粒重과 高度의 正의 相關을 보여주었고, 乾物量은 分枝數, 株當莢數는 高度의 正의 相關을 나타내었으며, 株當莢數는 草長, 莖直徑, 分枝數와 高度의 正의 相關을 나타내었다. This experiment was carried out estmate the proper amount of phosphorus fertilizer required to increase yield in growing cheju native black soybean in the volcanic ash soils of the cheju island. The results are summarized as follows: 1. The greater amount of phosphorus fertilizer, the higher plant height and stem diameter. 2. No. of branches, No of pods per plant and dry stem weight were greatest in 12㎏/10a of phosphorus fertilizer but No. of non pods per plant was not affected by level of phosphorus fertilizer. 3. No. of nodes of main stem and weight of 100 seeds were greatest in 9㎏/10a of phosphorus fertilizer but the difference shorted 4. Seed yield was greatest in 12kg/10a of phosphorus fertilizer. 5. Yield charaters which had a great influance on seed yield were plant height, stem diamter, No. of branches, dry stem weight, weight 100 seeds, and No. of pods per plant was positively correlated with plant height, stem diameter, and No. of branches, seed yield.