RISS 학술연구정보서비스

검색
다국어 입력

http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.

변환된 중국어를 복사하여 사용하시면 됩니다.

예시)
  • 中文 을 입력하시려면 zhongwen을 입력하시고 space를누르시면됩니다.
  • 北京 을 입력하시려면 beijing을 입력하시고 space를 누르시면 됩니다.
닫기
    인기검색어 순위 펼치기

    RISS 인기검색어

      검색결과 좁혀 보기

      선택해제
      • 좁혀본 항목 보기순서

        • 원문유무
        • 음성지원유무
        • 학위유형
        • 주제분류
        • 수여기관
          펼치기
        • 발행연도
          펼치기
        • 작성언어
        • 지도교수
          펼치기

      오늘 본 자료

      • 오늘 본 자료가 없습니다.
      더보기
      • Free Radical and Enzymatic Oxygenation of Eicosanoids : Synthesis of Isoprostanes and 5-Hydroxyeicosanoid Dehydrogenase Photoaffinity Ligand

        Kim, Seong Jin Florida Institute of Technology 2001 해외박사

        RANK : 233023

        Polyunsaturated fatty acids (PUFA) are oxidized by free radical and enzymatically. The F2-isoprostanes are unique series of prostaglandin-like compounds formed in vivo from the free radical catalyzed peroxidation of arachidonic acid (AA) 5 independent of cyclooxygenase enzyme. Recently, F3- and F4-isoprostane formations are also discovered in vivo by free-radical mechanism on phospholipids by peroxidation of eicosapentaenoic acid (EPA) 188 and docosahexaenoic acid (DHA) 189. <그림참조>(원문을 참조하세요) The synthesis of selected iPs, deuterated iPs and the development of GC/MS and LC/MS/MS methodology to identify and quantify were accomplished here. I have extended the initial focus of AA-derived iPs to metabolites of iPs, to provide a standard time for the measurement of the free radical oxidation in vivo by studying the mechanism of the metabolisms and the positive identity of metabolites of iPF2α-III and iPF2α-VI. <그림참조>(원문을 참조하세요) Moreover, I have synthesized group VI iPs derived from DHA and EPA, 356 and 370. The development of GC/MS and LC/MS/MS, as well as the syntheses of those deuterated iPs, 19,19,20,20-d4- iPF3α.VI 396 and 21,21,22,22- d4-iPF4α.VI 377 are reported here. DHA is the major polyunsaturated fatty acid (PUFA) in the brain. It is possible that the measurement of iPs derived from DHA can provide a unique index of free-radical damage in the brain and can be used for monitoring the progress of Alzheimer’s disease (AD) and the effectiveness of drug intervention. EPA is unique in that people on high fish diets (e.g. Inuits) have more EPA than AA. <그림참조>(원문을 참조하세요) Arachidonic acid is also metabolized by an enzymatic oxidation. 5- Lipoxygenase produces 5-hydroperoxy-6,8,11,14-eicosatetraenoic acid (5-HPETE), which is converted to 5-hydroxy-6,8,11,14-eicosatetraenoic acid (5-HETE). 5- hydroxyeicosanoid dehydrogenase (5h-dh) is a key enzyme involved in the transformation of 5-HETE to 5-oxo-ETE. 5-Oxo-ETE is the most potent eosinophil chemotactic factor among lipid mediators. We have proposed that 5-oxo-ETE may be a causative factor in diseases such as asthma involving the infiltration of eosinophils. 5-Oxo-ETE exerts its action by activating a dedicated receptor. Chemical synthesis of a radio photoaffinity labeled 5(S)-HETE analogs is necessary for the characterization, labeling, and purification of the enzyme 5h-dh. A photoaffinity radiolabelled trimethyl tin precursor was prepared by total synthesis and converted to the desired iodo derivative. <그림참조>(원문을 참조하세요)

      • Compositional Design and Substitution Analysis of Co-doped BaTiO3 and its Reliability

        Kim, Jin Seong 부산대학교 2013 국내박사

        RANK : 233007

        Tm2O3와 Dy2O3가 동시첨가된 고효율 MLCC용 유전체에 대하여 분말합성 단계부터 첨가제 조성, 치환거동, 가속시험 및 고장분석에 대한 연구를 수행하였다. 수열합성법 및 고상법을 통하여 입도가 균일한 나노크기의 BaTiO3 분말을 합성하였으며 Tm2O3와 Dy2O3가 동시첨가 된 BaTiO3에 대한 조성연구를 통하여 유전율 향상과 온도안정성을 동시에 만족시키는 조건을 제시하였다. 이러한 전기적 특성의 경향은 첨가제 조성에 따른 입성장 및 core-shell 구조 형성의 관점에서 증명되었다. Dysprosium의 첨가는 유전체의 전기적 특성에 기여한 반면에 입내에서의 빠른 확산속도로 인해 결정립 성장을 일으켜 온도안정성을 저하시켰다. 반면에, thulium은 shell 부근의 분포를 통한 입계강화로써 불안정한 온도특성을 보상하여 MLCC 신뢰성 기준인 X7R을 만족시켰다. 첨가된 희토류 원소의 BaTiO3 구조내의 실질적인 분포를 증명하기 위하여, 입자가속기 분석을 통하여 A와 B site의 전자구조해석 및 흡수에너지 차이를 각각 비교함으로써 perovskite 구조내의 치환 및 분포거동을 규명하였다. Dysprosium은 양쪽성 치환거동을 통하여 B site 우선 치환 후 A site에 치환하여 BaTiO3 구조내에서 각각 acceptor와 donor로 작용하면서 유전체의 전기적 특성을 증가시켰다. 반면, thulium은 구조내의 치환거동보다는 BaTiO3 입계에 존재하여 core-shell 형성에 관여하여 절연특성 및 온도안전성에 기여한다고 확인하였다. MLCC의 신뢰성과 관련하여, 조성연구를 통해 얻어진 최적조건에 대하여 BaTiO3의 Tc인 125°C 전후 조건에서 각각 가속시험 및 고장분석을 실시하였다. 온도에 따른 고장시간 분포의 적합도 검정을 통해 형상모수 및 활성화 에너지 차이를 확인하였으며 이를 분극곡선과 tetragonality 변화를 통해 Tc 전후에서 고장메커니즘이 차이가 남을 규명하였다. 이와 같은 조성연구, 치환거동분석 및 가속시험을 차후 관련된 연구에 접목시킨다면 고효율 MLCC용 유전체의 전기적/온도 특성 및 신뢰성 향상에 기여할 수 있다고 판단된다.

      • Mid Distance Communication : TheFuturistic Personal Signaling Methodby Semiotic Approach

        Kim, Jin Seong International Design School For Advanced Studies H 2013 국내석사

        RANK : 233007

        The history of graphic design of remote signaling communication technology has developed from traditional military kite as visual communication symbol to 21st century communication device like mobile phones. My goal is to explore the new types of symbols that represent interpersonal communication system. In addition, I would explore the theory of alienation, and distance between people in a social world in connection with signaling communication symbol. During the stage of development, my aim was on generating the concept and creating a code for communication, in addition to making the voice an interactive graphic code that can be transformed and used in many formats. In my next stage of research, my goal was to integrate visual variation like digital fabrication and movies on new types of symbols that represent a new interpersonal communication system during Media Environment studio 2, Digital Fabrication class. My research was done in two contradictory directions; both directions are related to mid-distance communication. The first proceeding research is focused on ‘Communication’ which started from the area of locative media, and examines new methods of communication. The second research focuses on the concept of ‘Distancing’ through the alienated relationship between humans and machines; the output of this direction will be expressed in one movie segment. ‘Mid Distance Communication’, the name and the idea of Korean Traditional Military Kite came from my supervisor David Hall. 커뮤니케이션의 역사는 신호전달체계와 궤를 같이 하며 발달하여 왔다. 현대 우리는 시각과 오디오로 시그널할 수 있는 세대인 텔레커뮤니케이션 세대에 와 있다. 하지만 개인이 의사소통을 할 수 있는 방법은아직 획일화 되어있다. 모바일폰이나 컴퓨터를 통해서 프로그램화 된스크린을 이용해 상대방과 마주보고 이야기한다는 개념보다는 서로 보이지 않는 거리에서 텍스트를 주고 받거나 영상을 주고 받는 원거리 통신에 익숙해져 가고 있기 때문이다. (Short or Long Distance Communication) 우리는 새로운 1인미디어; 언어의 이미지화가 자유로워진 시대 에 살고 있다. 무선랜을 통해서 송출 가능한 무작위의 이미지들이 장소에 구애 받지 않고, 1초도 되지 않는 시간 안에 전송되고 있다. 이런 가능성을 가지고, 현재 쌍방향 통신의 미개척 영역인 Mid Distance Communication이 가능한 새로운 방법을 연구한다. 그와 동시에 현대 커뮤니케이션과 기술이 야기하는 인간소외를 사회학적, 기호학적 접근방법으로 연구한다. 따라서 내 연구는 두 가지의 상반된 방향으로 진행되었다. 두 가지 모두 미드 디스턴스 커뮤니케이션에 관한 연구이지만, 한 가지는 커뮤니케이션에 초점을 맞추어 진행한 연구로, 로커티브 미디어의 영역에서 출발하여 새로운 커뮤니케이션방식의 출연에 기여하는 것이고, 다른 한가지는 거리감에 초점을 맞추어 기계 혹은 미디어의 종속에 관한 고찰을 통해 소외라는 개념을 표현한 영상을 만드는 것이다.

      • Monetary policy spillovers in risk perceptions at the zero lower bound

        Kim, Seong-jin Graduate School, Yonsei University 2017 국내석사

        RANK : 233007

        본 논문은 국제금융위기 이후 제로금리 환경에서 미국의 통화정책 충격이 국내 주식시장과 환율시장의 수익률과 시장참여자의 위험 지각에 어떤 영향을 미치는지 구조형 VAR 모형(Structural VAR)을 통해 실증분석하였다. 고빈도 자료와 변동성지수를 사용하여 시장의 위험회피도와 불확실성에 대한 추정치를, 옵션자료와 보간법(Interpolation)을 통해 Tail risk에 대한 추정치로 리스크 리버설을 구하고, 통화정책에 대한 정보를 추출한 잠재금리의 충격이 위 3가지 위험 척도와 시장 수익률에 어떤 영향을 주는지 분석하였다. 실증분석 결과, 국제금융위기 이후 미국 연방준비위원회의 양적 완화 충격이 국내 주식시장과 환율시장 참여자의 위험 지각에 대한 추정치를 하락시킨 것을 확인하였으며, 각 시장 참여자의 위험 지각 추정치의 상승 충격이 주가수익률을 하락시키고 원화 가치를 하락시키는 결과를 확인할 수 있었다. Using risk perception estimators, risk aversion and uncertainty derived from decomposing volatility indexes with high frequency data, and a tail risk perception proxies from interpolating risk reversals, this study investigates the spillover effect of US monetary policy on the Korean stock and foreign exchange markets under a zero interest rate environment. Empirical tests under a Structural Vector Autoregressive (SVAR) framework shows that an expansionary monetary policy decreases risk perception parameters in both markets. In addition, the results confirm that an incremental shock in risk perception estimator has decreased the stock index return and depreciated the value of Korean Won in the post-Global Financial Crisis (GFC) period.

      • Cathepsin B-Specific Prodrug Nanoparticles to Overcome Tumor Heterogeneity

        Kim, Jin Seong 고려대학교 KU-KIST융합대학원 2023 국내박사

        RANK : 233007

        암은 다양한 치료법의 개발에도 불구하고 여전히 전세계 사망 1위의 질병이다. 암 치료법에 있어 화학 요법은 가장 흔히 사용되는 치료법이지만, 비특이적 독성으로 인해 심각한 부작용과 면역 저하를 초래한다. 이를 개선하기 위해 다양한 항암제가 개발되었지만, 심각한 부작용과 종양 내 이질성과 약물 내성으로 인해 임상적 접근이 제한되고 있다. 이에 본 연구에서는 항암 효과를 향상시키기 위해 종양 특이적으로 작용하고 면역 활성을 유발할 수 있는 암세포 특이적 항암 나노 전구체(PNPs)를 개발하였다. PNP를 이용한 다양한 약물의 병용 치료를 통해 항암 효과를 증가시키고자 하였다. PNPs는 종양에서 과발현되는 카뎁신 B 효소에 의해 절단 가능한 펩타이드 FRRG와 독소루비신이(DOX) 결합하여 자가조립되는 나노 제형을 형성할 수 있도록 설계되었다. 제 2장에서는 PNPs의 복강 내 투여 효과를 복막암종(PC) 난소암에서 확인하였다. 복강 내 화학요법은 난소암에서 유망한 효과를 보였지만, 생체 내에서 빠른 제거와 심각한 독성으로 인해 치료가 제한적이다. 그러나 PNP의 복강 내 투여는 높은 암 특이성과 생체 내 체류시간에 의한 직접적인 침투와 혈액 관련 축적을 통해 복막암에 효과적으로 축적될 수 있었다. 특히, 난소 종양 이식 모델 (POX) 및 환자 유래 이식 모델 (PDX)과 같은 임상적으로 유의미한 질병 모델에서 강력한 항암 효과를 확인할 수 있었다. 제 3장에서는 화학 항암제 반복 투여로 인한 후천적 약물 내성 극복을 위해 PNPs와 내성 인자 B-cell leukemia/lymphoma-2 (Bcl-2)의 발현을 억제할 수 있는 Navitoclax와의 병용 치료를 시행하였다. 화학 항암제 및 내성 억제제를 사용한 치료는 주목할만한 치료 효과를 보였지만, 심각한 독성으로 인하여 치료가 제한적이었다. 그러나 PNPs와 Navitoclax의 병용 치료는 세포 특이적 독성을 유발하면서 동시에 내성 인자인 Bcl-2의 발현을 감소시켜, 후천적 약물 내성 암에 대한 유망한 치료법을 제시할 수 있었다. 제 4장에서는 기존 항암제의 한계와 완전관해를 극복하기 위해 면역 세포를 활성화시켜 치료하는 항암 면역치료법에 대한 연구를 진행하였다. 이를 위해 강력한 면역원성 세포사멸을 유도할 수 있는 프로 아포토시스 프로드러그를 형성하는 PEGlyated 리포좀(Aposome)을 설계하여 우수한 면역 체크 포인트 억제 치료법을 개발하였다. Aposome 치료는 SMAC 펩티드에 의한 IAPs (Inhibitor of apoptosis proteins) 길항을 효과적으로 촉진하여 면역원성 세포 사멸 프로그램을 향상시키고, 면역 반응성을 가진 종양 미세환경을 유발하여 면역 체크 포인트 억제 치료에 대한 반응성을 증가시킬 수 있었다. Aposome 치료는 항-PD-L1 항체와 병용 시 종양을 효과적으로 제거하고 종양 재발을 예방하며, 면역 체크 포인트 억제 치료의 효과를 향상시킬 수 있는 잠재력을 강조한다. Cancer, despite the development of various treatment methods, remains the leading cause of death worldwide. While chemotherapy is the most used treatment for cancer, it often leads to severe side effects and immune suppression due to its non-specific toxicity. To improve this, various anticancer agents have been developed, but their clinical approach is limited due to serious side effects, tumor heterogeneity, and drug resistance. In this study, I developed tumor-specific anticancer nano prodrugs (PNPs) that can enhance anticancer effects and induce immune activation. The aim of this study was to enhance the anticancer effects by employing combination therapy, utilizing tumor-specific anticancer nano prodrugs (PNPs) in conjunction with various drugs. PNPs were designed to self-assemble by combining a cleavable peptide, FRRG, which is overexpressed in tumors by the enzyme carboxypeptidase B, and a cytotoxic drug, doxorubicin. In Chapter 2, I investigated the impact of intraperitoneal administration of PNPs in peritoneal and ovarian cancers. Intraperitoneal chemotherapy has demonstrated promise in treating ovarian cancer; however, its therapeutic potential is hindered by rapid elimination and severe systemic toxicity. Nevertheless, the intraperitoneal delivery of PNPs facilitated effective accumulation in peritoneal cancer by directly penetrating the tumor and accumulating in the blood, benefiting from high tumor specificity and prolonged residence time. Notably, robust anticancer effects were observed in clinically relevant disease models, including patient-derived xenograft (PDX) and peritoneal ovarian cancer xenograft (POX) models. In Chapter 3, a combination therapy using PNPs and Navitoclax, an inhibitor of the resistance factor Bcl-2, to address acquired drug resistance resulting from the repeated administration of anticancer drugs. Although treatment with chemotherapeutic agents and resistance inhibitors demonstrated notable anticancer effects, their efficacy was constrained by severe toxicity. However, the combined therapy of PNPs and Navitoclax cell-specific toxicity while simultaneously reducing the expression of the resistance factor Bcl-2. This innovative approach holds significant promise as a treatment modality for acquired drug-resistant cancer. In Chapter 4, focused on anticancer immunotherapy, a treatment approach that activates immune cells to combat cancer, with the aim of overcoming limitations associated with conventional chemotherapy. To achieve this goal, I developed PEGylated liposomes called Aposomes, which serve as pro-apoptotic prodrugs capable of inducing potent cell death. This significant advancement resulted in the development of an outstanding therapy that involves immune checkpoint inhibition. Aposome therapy effectively stimulated programmed cell death in immune cells by inhibiting apoptosis proteins (IAPs) through SMAC peptides, thereby creating an immune-responsive tumor microenvironment and enhancing the responsiveness to immune checkpoint inhibition therapy. Importantly, when combined with an anti-PD-L1 antibody, Aposome therapy demonstrated remarkable efficacy in tumor elimination, prevention of tumor recurrence, and highlighted its potential to significantly enhance the effectiveness of immune checkpoint inhibition therapy.

      • Developing a framework of u-learning for research and practice

        김성진 Graduate School of Information, Yonsei Univerisity 2010 국내박사

        RANK : 232991

        The purpose of this study is to develop a framework of u-Learning for research and practice, especially for promoting the benefits for all the participants and stakeholder in u-Learning services. In this study, we analyzed the status of Korean u-Learning programs currently in service as a next generation public education method, on the basis of digital textbook cases, the requirements for successful future diffusion of the u-Learning solution, and how the solution is recognized in the education field. We conducted four experiments on important aspects of the u-Learning environment from students’ and teachers’ perspectives. First, to identify user satisfaction with technological factors and learning effectiveness in the u-Learning environment, we used digital textbooks to conduct an empirical analysis of students. Second, we conducted a survey of teachers to identify the quality level of the u-Learning service as well as ZOT analysis to measure the service quality. Third, to determine the criteria for selecting the appropriate network solution for the u-Learning environment, we observed existing corresponding criteria and conducted a comparative analysis of wireless network services available in Korea, focusing on the factors required for the u-Learning environment. Finally, we detailed the four security requirements and 11 sub-elements pursuant to the characteristics of u-Learning, conducted a survey of the teachers who use digital textbooks, and obtained priorities by applying an ANP(Analytic Network Process) analysis to the survey data. According to the study’s results, the research on user satisfaction showed that general satisfaction with technical factors declined in 2009 from the level observed in 2008. However, user satisfaction with the network solution increased significantly. Observing the factors for user satisfaction with the learning effect revealed generally higher satisfaction for the digital textbook than for the normal paper textbook, which suggests that the former can possibly replace the latter in the future. The results for the overall service quality perceived by users for digital textbooks fell far behind the adequate level users had expected of the five measures, reliability received the lowest score. A comparison of the service qualities for each operating system(OS) showed generally a low score for the digital textbook service based on the Linux OS compared with the Windows-based OS. The wireless LAN(local area network) solution based on IEEE 802.11x applied to the digital textbook service in Korea was evaluated as the appropriate, at least in the current stage of the service, in terms of the speed and economic requirements for processing large-scale multimedia. However, this solution was compared unfavorably with HSDPA or mobile WiMAX. In the future, it might be desirable to establish the u-Learning environment by combining the existing wireless LAN solution with mobile WiMAX or HSDPA or future wireless network technologies such as LTE. Finally, the security priority research showed that the teachers in the field recognize confidentiality as the top priority of the four security requirements. In particular, teachers who use digital textbooks based on the Linux OS singled out “assurance of integrity of information in transmission” as the most significant requirement. Compare to other existing researches, this study suggests the u-Learning solution from the aspect of ICT(Information and Communication Technology) including user satisfaction, quality of the system, accessibility to the network, and security requirements. The results of this study will be used to establish government policies and other relevant business strategies and will provide a useful guideline for other nations and overseas business operators who wish to build a u-Learning environment for public education.

      • Directional crystallization in the Bi-Sr-Ca-Cu-O system : effect of phase separation

        김성진 University of Arizona 1992 해외박사

        RANK : 232990

        산화물 고온초전도체중 Bi-Sr-Ca-Cu-O 계의 초전도현상은 특히 중요한대, 그 이유는넓은 범위 의 조성의 용융체가 냉각하면서 유리를 형성하기 때문이다. 용융체의 냉각에의한 유리형성은 고영돤섯�결정화유리(Glass-Ceramics) 제조방식을 응용해서제조하는 가능성을 제시한다. 고온 초전유용하게 사용되려면 임계온도(CriticalTemperature) 뿐만 아니라 임계전류밀도(Critical Currenity) 도 향상시켜야 한다. 다정질 고온초전도체의 임계전류밀도를 향상시키기 위해서는 입계 (Grandary)의양이 최소화되어야 하는데, 이를 위해서 배향성이 있는 미 구조가 요구된다. 본 연구에뉩完茱�결정화 (Unidirectional Crystallization)가 실험 및 이론적으로 연구되었다. 배향성 결좆育뗐섯�냉각해서 유리를 만든후 온도구배(Temperature Gradient)가 있는 상태에서 결정화하는 다. 여기서 온도구배를 유리에 적용시키는 목적은핵 형성에 속도론적인 제한(Kinetic Limitation고 결정성장을 촉진하기 위함이다. Bi-Sr-Ca-Cu-O 계 유리로 부터 배향된 미 구조를 얻기 위해 본적용되었다. 열분석(Differntial Thermal Analysis) X-ray 회절분석 (X-Ray Diffraction), 그말聆峙隔�(Transmission Electron Microscopy) 을 통해 최초로 Bi₂Sr₂Ca₁Cu₂Ox 와Pb0. 32Bi1. 75Ca₂Cu₃Ox 의 유리 조성의 분상현상을 관찰하였다. 이 분상이 본방법을 통해 배향된 미 구조링�방해요인이 되는데 그 이유는 분상된 유리의 한 조성의“R” 상의 조성에 근접하고 열 처리 �” 상 조성의 결정핵 형성에 수 많은 자리를제공하기 때문이다. 이 분상 현상이 본 유리조성의 결정화의 원인이 된다. 즉처음에는 본 유리가 “R” 상 으로 다음에는 Bi₂Sr₂Ca₁Cu₂Ox 상의 로 결정화된다. 본 방식을 좀 더 이해하기 위해 이론적인 연구가 수행되었다. 개발된 이론적인모르면 결정과 용융체 사이의 계면에너지 (Interfacial Energy)가 많은 용융체가본 방식을 통해 배조를 얻는데 좋은 후보이다. 본 모델을 시험하기 위해 잘 연구된Lithium Diborate 유리가 사용되배향성이 우수한 구조를 생산하였다. 따라서,배향성 결정화는 분상이 존재하지 않는 균일한 유리적인 제조공법의 한 방법이된다.

      • Oxide thin films grown at low temperature for application to embedded decoupling capacitors

        김진성 Graduate School, Korea University 2014 국내박사

        RANK : 232990

        Dielectric thin films which are Ca0.15Zr0.85O1.85 (CSZ), (Ca, Sr)0.15(Ti, Zr)0.85O1.85 (CSTZ), and BaTi4O9 (BT4) compositions were developed, and their structural and electrical properties were investigated in order to reduce size of the multilayer ceramic capacitors (MLCCs) for embedded capacitor application. The calcium stabilized zirconia film which composition is Ca0.15Zr0.85O1.85 (CSZ) was successfully formed on a Pt/Ti/SiO2/Si substrate even at room temperature (RT) by radio-frequency (RF) magnetron sputtering using CaZrO3 target. The dielectric constant (k) of the films grown at RT was approximately 16.9 and increased with increasing growing temperature, reaching a maximum value of 29.3 for the film grown at 500oC due to the increase of grain size and crystallinity of the film. In particular, the CSZ film grown at 300oC with a thickness of 95 nm showed a high k value of 22.5 with a low dissipation factor of 0.64 % @100 kHz, and a low leakage current density of 3.88 nA/cm2 at 1.0 MV/cm with a high breakdown voltage 22.8 V. The similar k value of 26.7 and a very low tan δ of 0.0015 (Q value of 646) was obtained at 2.0 GHz, representing a potential for embedded capacitors. This film also exhibited a high capacitance density of 264 nF/cm2 with a very stable temperature dependency (TCC = 87 ppm/oC). To further improve the dielectric properties of CSZ films, Sr and Ti elements were added to the CaZrO3 composition. Higher dielectric constant value of 50.3 for the (Ca0.7Sr0.3)(Ti0.2Zr0.8)O3 (CSTZO) ceramics was obtained which is significantly higher compared to CaZrO3 ceramics (εr=30). The structural and electrical properties of the films were investigated. The crystalline calcium stabilized zirconia phases which composition (Ca, Sr)0.15(Ti, Zr)0.85O1.85 (CSTZ) films were grown on the Pt/Ti/SiO2/Si substrate even at RT by RF magnetron sputtering using CSTZO target. The improvement k value of 30.5 with a low tan δ of 0.007 at 100 kHz was obtained in the film grown at 300oC, and the similar k value of 30.4 with a low tan δ of 0.004 (Q value of 225) was also obtained at 1.0 GHz. This film also showed a high capacitance density of 305 nF/cm2 with a small TCC of - 60.7 ppm/oC at 100 kHz and a low leakage current (1.4 × 10-8 A/cm2 at 1.5 MV/cm) with a high breakdown electric field (1.85 MV/cm). The leakage current of this film was explained by the Schottky emission and Schottky barrier height which was calculated to be 2.20 eV. Therefore, the CSTZ films grown at low temperatures (≤300oC) are good candidates for the embedded capacitor in a printed circuit boards (PCBs). In order to confirm the application feasibility of CSTZ film for embedded capacitor, CSTZ films were deposited on a Cu/Ti/SiO2/Si substrate because Cu metal is used as an electrode in PCBs, and their structural electrical properties were investigated. Cu oxidation was observed for the films grown in a mixed Ar to O2 gas atmosphere (Ar:O2=9:1) but not in films grown under Ar-only ambient. The 240 nm-thick CSTZ film grown on Cu electrode at RT under sputtering power of 75 W was well developed without reaction between the film and Cu electrode. However, the k value was slightly decreased to 19 comparing with film grown at RT on Pt electrode (k= 30.5), which is probably due to the formation of large amount of oxygen vacancies. This film exhibited a similar k value of 19.4 and tan δ of 0.019 (Q value of 52.6) @ 2 GHz. This film also showed a high capacitance density of 76 nF/cm2 and a small TCC of 256 ppm/oC with high breakdown voltage of 59.5 V. This film grown on a Cu electrode satisfied the International Technology Roadmap for Semiconductors (ITRS) requirement until 2016. Therefore, this film is a good candidate material for embedded capacitors. In addition, amorphous BaTi4O9 (BT4) films for use as capacitors embedded in PCB substrates were grown on Cu electrodes at low temperatures (≤ 200oC). The k value of the amorphous BT4 film grown at RT was 38, and its dissipation factor was 3.2 % at 100 kHz. A similar k value was obtained at radio-frequency ranges, with a quality factor of 143 at 1.0 GHz. The films showed a capacitance density of 200 nF/cm2, TCC of 296 ppm/oC at 75 kHz, and a breakdown voltage of 42.5 V. This film therefore satisfies the requirements of the ITRS until 2016 for capacitors grown on organic substrates. In addition, the leakage current mechanism of the amorphous BT4 films was found to be Schottky emission, and the Schottky barrier height was calculated as 2.26 eV. In conclusion, CSTZ and BT4 films grown at low processing temperature (RT) are considered promising materials that can reduce the size of MLCCs for embedded capacitors.

      연관 검색어 추천

      이 검색어로 많이 본 자료

      활용도 높은 자료

      해외이동버튼