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      • Monolithic Trantenna : Terahertz Detectors Based on Silicon Ring-Gate Plasmonic Field Effect Transistor

        E-San Jang Ulsan National Institute of Science and Technology 2021 국내박사

        RANK : 233007

        In this dissertation, the Monolithic Trantenna (Transistor + Antenna) as high-performance terahertz(THz) detector; based on Silicon (Si) nano-ring type field-effect transistor (FET) is demonstrated for sub-THz imaging technology. And its operation based on highly localized plasmonic wave in the scalable ring-channel is analyzed by using technology computer-aided design (TCAD) and electromagnetic (EM) wave solver tools. The ring-FET is fabricated by Si-CMOS process and we obtained total 900-fold photoresponse ( u) enhancement in on-chip ground-signal-ground (GSG) probing measurement setup. For the high capacitance asymmetry a = Cgd=Cgs, the inner circle diameter (din) is scaled down to 130 nm under the parasitic resistance limit case. Furthermore, the u asymmetry originated by different ground(gnd) source configuration between (i) gnd-out or (ii) gnd-in of the ring-gate is analyzed for the higher responsivity Rv and lower channel thermal noise. Therefore, by taking (i) gnd-out source, we characterized 5-times additional enhancement followed by the 180-times from din and a scaling. Finally, based on the highly localized plasmonic ring-FET, high performance compact THz detector is demonstrated in free-space by using the compact monolithic Trantenna structure without the external amplifier gain. For a higher THz wave power absorption design, the conductive circular active area of ring-FET is designed as circular patch antenna with resonant frequency and the THz wave is absorbed directly in the ring-channel for the plasmonic rectification without the lossy feeding network. As a result, The record-high RV over 12 kV/W and low noise equivalent power of sub-10 pW/Hz0:5 without external gain are experimentally achieved through free-space 0.12 THz illumination. Moreover, free-space THz imaging experiments shows polarization-independent imaging results due to an isotropic circular antenna characteristic.

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